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Scandium Target
Custom non-standard size production are acceptable.
Hunan Rare Earth offers high-quality Scandium Target at the most competitive price.
Description
Purity：2N5~3N5(absolute purity)
Packaging Method: vacuum packaging, paper box or aircraft box sealing
Specifications
Standard Model:
|
Standard |
Hunan Rare Earth Standard |
|||
|
Grade |
Sc-3Na5-T |
Sc-3Na-T |
Sc-2Na5-T |
|
|
Sc, no less than(%) |
99.95 |
99.9 |
99.5 |
|
|
Sc/RE， no less than(%) |
99.999 |
99.99 |
99.95 |
|
|
The impurity content shall not exceed (ppm) |
Al |
30 |
50 |
100 |
|
Si |
20 |
30 |
50 |
|
|
Fe |
50 |
120 |
200 |
|
|
Ca |
30 |
50 |
100 |
|
|
Cu |
20 |
30 |
50 |
|
|
Cr |
10 |
30 |
50 |
|
|
Ni |
50 |
80 |
150 |
|
|
Mn |
20 |
30 |
50 |
|
|
Ta |
20 |
30 |
50 |
|
|
W |
10 |
20 |
30 |
|
|
C |
100 |
150 |
300 |
|
|
O |
200 |
300 |
500 |
|
|
Biding Mode |
Indium solder bonding |
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|
Typical Specifications |
Square Target |
101.6*101.6*6mm，270*120*6mm，320*100*8mm |
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|
Round Target |
Φ50.8*5mm, Φ76.2*5mm, Φ101.6*5mm, Φ203.2*6mm, Φ327.7*5mm, Φ332*7mm |
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Product application:
It is used for the preparation of AlScN piezoelectric films for RF devices and MEMS by PVD dual-target magnetron sputtering, as well as the new generation of AlScN ferroelectric films for storage.
Technical advantages:
1. Using high purity scandium metal as raw materials, product purity as high as 3N5 absolutely, key impurity control strictly, O≤200ppm，Fe≤100ppm;
2. The average grain size < 200 microns;
3. Support custom non-standard size production.
